0010-02142
P/N:02142
PCV-002
HTF Process Chamber
PCV Valve
RTP Buffer Chamber
PCV Valve
AMAT Centura 5200 HTF T/F
253B-11203
253B-1-40-1
253B-13964
253B-26278
253B-15488
PCV-003
HTF Process Chamber
PCV Valve
RTP Chamber PCV Valve
AMAT Centura 5200 HTF T/F
253B-14570
253B-20-40-1
253B-16182
253B-25076
PCV-004 Asher Chamber Throttle
Valve
GaSonic /
IPC L3500 Asher ETCH P/N:253B-11020
PCV-005 Load Lock
Throttle vlave Novellus C1 APC ET
P/N: 253A-11321
?253A-12457
?253B-13264
PCV-006 Producer Valve PSC PSC Asher ET P/N:96045136L
PCV-007 PCV Throttle Valve AMAT Centura 5200 IISG T/F
253B-14579
253B-12237
PCV-008 Throttle vavle AMAT TEL MB2 WCVD PCV T/F
PCV Throttle Valve(頭小)
P/N:RSX-50
P/N:RXC-50
PCV-009 Throttle vavle AMAT TEL MB2 WSIX PCV T/F
Throttle vavle
P/N:RSX-100J
?
PCV-010 MSK Throttle vavle AMAT Centura 5200 CVD T/F 253B-24627
253B-16083
PCV-011 Producer SA Throttle
Valve AMAT Producer SA-CVD T/F SA Throttle Valve
PCV-012 FK-4 6" TEOS Throttle AKT AKT4500 TEOS T/F 653B Throttle valve
653B-6-160-2
PCV-013 Process Chamber APC
Valve TEL 85 DRM / 88
SCCM Poly Etch Etch
VAT:
61144-PH52-AAM1
6" APC Valve
PCV-014 HDP Turbo Throttle
Valve 200mm Wafers AMAT Centura 5200 HDP T/F
0010-08384-12939900-166
P/N:PK243A2A-SG36
PCV-015 Process Chamber APC
Valve TEL 85DRM / 88SCCM Poly Etch Etch VAT: 61144-PA52-AAM1
PCV-016 Throttle valve AMAT Centura 5200 HDP T/F P/N:253B-11102
PCV-017 Throttle valve AMAT Centura 5200 CVD T/F 253B Throttle valve
PCV-018 MKS THROTTLE
VALVE Novellus Centura 5200 CVD T/F 653B-1-40-1
653B-2-50-1
PCV-019 MKS THROTTLE
VALVE AMAT 153D-15973
153D-15972(雙頭龍)
P.3
?
PCV-020 MKS THROTTLE
VALVE AMAT T/F 253B-11010
253A-11010
PCV-021 MKS THROTTLE
VALVE AMAT 153D-21381
PCV-022 MKS THROTTLE
VALVE AMAT Producer
Novellus 253B-15415
PCV-023 MKS THROTTLE
VALVE AMAT 253B-11203
PCV-024 NVLS
PCV-025 8" Thtottle valve LED 653B-22815
653B-29725
PCV-026 253B-60-63-1
PCV-027 爐管 OEM P/N: 253B-2-50-2
KF50, 180度
PCV-028 HDP Turbo Throttle
Valve 200mm Wafers AMAT Centura 5200 HDP T/F
PCV-029 MSK Throttle vavle AMAT T/F
P.4
?
PCV-030 153D-20-40-1
PCV-031 MSK Throttle vavle AMAT 253B-60-63-2
PCV-032 MSK Throttle vavle AMAT 253B-11328
PCV-033 MSK Throttle vavle AMAT 253B-8-200-2
PCV-034 MSK Throttle vavle AMAT 253B-3-80-2
253A-3-80-2
PCV-035 MSK Throttle vavle AMAT
253B-27164
MOTOR(MOT-003)內有
Spring Seal
PCV-035S Spring Seal
PCV-036 MSK Throttle vavle AMAT
PCV-037 APC MEGATOR
R CORP MR50KFV000SN605
PCV-038 MSK Throttle vavle 253B-6-160-2
P.5?
PCV-039 MSK Throttle vavle 253B-60-63-1
PCV-040 MSK Throttle vavle 253B-26662
Throttle-001 8" TxZ Throttle Valve AMAT Endura 5500 CVD-TiN
PVD T/F
PN:0010-09035
0010-377680010-09035
0010-38027
Throttle-001P Plug Bushing鐵氟龍 AMAT Endura 5500 CVD-TiN
PVD T/F
PN:0010-09035
0010-377680010-09035
0010-38027
Throttle-002 6" WCVD Throttle Valve AMAT P-5000 W-CVD T/F
ETCH
0010-10082
Throttle-003 Throttle vavle AMAT 0010-05496
0015-09077
Throttle-004
8" SA-CVD Throttle Valve
8" TEOS / DxZ Throttle
Valve
AMAT Centura 5200 SA-CVD
TEOS T/F
P/N:0010-10778
P/N:0090-0034-001
Throttle-005 6" TEOS Throttle Valve AMAT P5000 TEOS T/F P/N:0010-09301
Throttle-006
AMAT Applied Materials
?Non-Heated Throttle
Valve
AMAT Endura 5500 Copper Seed T/F 0240-28146
0010-09019
Throttle-007 SA Producer Throttle
valve AMAT Producer SA-CVD
BPSG T/F
0010-09857
0010-26231-001
0010-37140
Throttle-008 6" Nitride Throttle valve AMAT P-5000 Nitride T/F 0010-76175
P.6
?
Throttle-009 Throttle valve AMAT AMAT:0020-32117
Throttle-010 Throttle valve AMAT
Throttle-011 Throttle valve AMAT
Throttle-012 Throttle & ISO valve
Assembly AMAT P5000 PN:0020-31281
Throttle-013 Throttle valve AMAT PN:0020-19494
Slit Door-001
Slit Valve door plate seal
Seal Slit Valve door
Slit Valve Door
AMAT Endura 5500
Centura 5200 CVD T/F
P/N: 485835-003
P/N: HC-W-001-S
P/N: WT04-001-R02-1
Slit Valve-001 8"Bellows assembly Slit
valve AMAT
Endura 5500
Centura 5200
Proudcer
Mainfram T/F
NCDQ2B80-UIA990
NCDQ2B80-G0656
NCDQ2B80-GO656-38
0020-35764,3020-01052
Slit Valve-002 AMAT Endura ENDURA
PRECLEAN P/N:0010-20753
Slit Valve-003 P/N:02110-BA24-
BMS1/0071
Slit Valve-004 VAT Slit Valve VAT P/N:
07512-UA24-0002/5576
Slit Valve-005 VAT Slit Valve VAT Producer
PN:
0750X-UE24-AAL8/2862
0750X-UE24-AAL8/2710
P.7
?
Slit Valve-006 VAT Slit Valve VAT Producer 0340X-MH24-AP11/1445
PN:0010-05574/1445
Slit Valve-007 300mm Slit Valve Producer 0040-50505-002
3020-00077
Slit Valve-008 VAT Slit Valve Producer VAT 0340X-CA24
VAT 0300X-CA24-All1/
Slit Valve-009 KITZ SCT Double Action
Cylinder-001
Cylinder-002 Slit Valve Door Cylinder AKT5500 LCD SMC
NCDQ2WB160-
UIAO00496
AMAT P/N:0190-71750
Cylinder-003 P/C VACUUM VALVE AKT5500 LCD SMC NCDQ2A100-UIA960780
AKT P/N:10093262
Cylinder-004 P/C VACUUM VALVE AKT5500 LCD SMC
Cylinder-005 VAT CYLINDER VALVE 太陽能 0680X-VA24
Cylinder-006 FESTO CYLINDER
VALVE 太陽能 DNGZK-50-100-PPV-A?S3(O)N3(NEW TYPE)
Cylinder-009 Cylinder AMAT
Cylinder-010 Cylinder
P.8
?
Cylinder-013 Cylinder
Cylinder-014 Cylinder All-21516-05(ψ70*70)
Cylinder-015 Cylinder VAT 優貝克
Isolation-001
Nor-Cal Pneumatic Valve
NW40 Flange
FORELINE Isolation
Valve
AMAT Centura 5200 /
P5000
Oxide / HTF
/ TEOS T/F
NC NW40 Weldod
bellow(180 度) /
P/N: 3870-01244
Isolation-002
HDP/MKS Instruments
Round Body Right Amgle
Vacuum Valve( loadlock )
AMAT
LAM
Producer
or
process chamber
傳動用
or
Oxide
T/F
ETCH
NW40
P/N:296-094383-001
LPV-50-AK-COVS
796-801289-001
796-094363-002
796-094363-001
Isolation-003 Isolation Valve LAM LAM9600 Metal ETCH MKS NW50 2"180度Valve
Bellow
Isolation-004 VALVE,ISO 11/2 MOD LAM
LAM9600
Endura 5500
SE
CFE
HDP ETCH NW25
839-013521-001
Isolation-005 Isolation Valve LAM
AMAT
LAM9600
AMAT Producer
SE
Metal ETCH
PK245-02AA
P/N:0010-10778
P/N:0010-70271
Isolation-006 Isolation Valve AMAT
Endura
HDP
P5000
STI
IMD
FSG
TxZ CVD
HDP
T/F ET
NW40 NC 11/2"valve
bellow(90度)
3870-01256, 800-824-
4166, P/N:3870-01455
0190-00879,3870-
02890,0190-00879
Isolation-008 Isolation Valve AMAT DPS
Endura 300 mm Poly T/F
0190-70185 /0190-76185
NW40 MKS 11/2(180度)
93-6127 796-001289-001
L2-40-AK-225-UNUNH
L2-40-SP1/138-70-600
?
Isolation-009 Buffer Chamber Isolation
Valve AMAT Centura5200
WCVD
Mainfram
Buffer
T/F
P/N:162-0040K
3870-01422 / NW40
Isolation-010 Isolation Valve AMAT
Endura
Cendura
HDP
TxZ CVD
STI
IMD
T/F
P/N: 3870-01256 / NW40
?050127-20
?3870-01334
Isolation-011
VALVE TURBO ISO
FITTING AT 180DEG
ULTIMA
AMAT HDP
STI
IMD
FSG
T/F
P/N: 3870-02890
NW40 MDC 11/2"valve
bellow(90度) 內附gaskat
(KAV-150-P 311074)
(NW40-HV-PNEUM-
311074-10)
Isolation-012 Isolation Valve AMAT P5000
Endura HDP P5000
Asher
HDP T/F
P/N:3870-01213
NW25 NC 11/2"valve
bellow(180度)
Isolation-013 Isolation valve LAM LAM2300 Metal ETCH
T/F P/N:796-801289-001
Isolation-014 Isolation valve
SOFT，
PUMP，
LOADLOC
K
AMAT Producer Implant ET L2-40-AK-225-VNVNH
Isolation-015 Isolation valve Axcelis GSD 200 Implant DIFF P/N:RSX-50
Isolation-016 Isolation Valve Endura
chamber ROUGH VALVE, 粗
抽閥 NW25
TF P/N:KAV-075-P
P/N:3870-01334
Isolation-019 ISO Valve AMAT Endura
Cedura HDP T/F
P/N: LPV1-40-AK-CNVS
P/A: 10099R0421
Isolation-020 ISO Valve LAM TCP9600 VAT ETCH
VAT: 62034-KE18-
AAA1/004
62034-KE18-AAA1
Isolation-024 NW50 MKS Isolation valve AMAT Endura
Centura 5200 DSP ETCH
T/F
P/N:99121728
P/N:LPV-50-AK-COVS
P.10
?
Isolation-025 Isolation Valve AMAT Centura poly T/F P/N: 162-0050K
Isolation-026 Isolation Valve LAM 9600 SE T/F P/N:839-032906-001
Isolation-027 Isolation Valve SMC ETCH XLA-40-X505
1D80-002748-11
Isolation-028 ISO VALVE隔離閥 AMAT E-MAX CVD ETCH P/N: #ESVP-1503T-NWB?CR
Isolation-029 Chamber Roughing Valve AMAT Enndura II XP PVD Cobalt T/F
MKS, UHV-25-AKK?ENVN, NW25
MKS, UHV-25-AKC-ENVN
Isolation-030 Isolation Valve AMAT HDP WCVD STI
IMD
T/F NW50
Isolation-031 Producer MKSvacuum in
line type(L/L & Buffer) AMAT Producer ARC T/F LPV1-40-IK-CNVS tsmc
P/N:30076187
Isolation-033
Isolation-034
Isolation-035 Load Lock
VACUUM VALVE AKT5500 LCD MDC AV-303-PAA RIGHT
311044-1000
Isolation-036 ISO NW-40 AKT5500 LCD MDC KAV-150
311074
Isolation-037 Isolation Valve MOD:851-5095
P.11
?
Isolation-038 Isolation Valve MDC AKT4500
NW-50(WD)
PN:KAV-200-PAA
AMAT:0190-66069-AMAT
Isolation-039 ISO NW-25 日暘HTC NW-25
Isolation-040 Isolation Valve 日暘HTC NW-100
Isolation-041 Isolation Valve SMC ETCH XLA-16A-X501
1D80-002742-11
Isolation-042 Load Lock
VACUUM VALVE AKT5500 LCD MDC 99F0078(NW-80)
Isolation-043 Isolation Valve Tempress and RCH
Leybold
D65 oil
Pump
NC 800-824-4166
PN:920-2000
Isolation-045 Isolation Valve 0240-32165
Isolation-046 800-824-4168
Gate Valve-001 Model:11110-0603
(六吋6")
Gate Valve-002 SMC
Gate Valve-003
Gate Valve-004 USC GATE VALVE ULVAC LCD
P.12
?
Gate Valve-005 GATE VALVE VAT
12146-PA44-AOZ1/0041
12146-PA44-AOZ1/0059
12146-PA44-AOZ1/0079
Gate Valve-006 GATE VALVE VAT PN:64246-PE52-0003
Gate Valve-007 GATE VALVE VAT PN:F14-53980-20
Gate Valve-008 GATE VALVE HVA Model:11110-0403
(四吋4")
Gate Valve-009 GATE VALVE HVA Model: (三吋3")
Gate Valve-010 GATE VALVE MDC Model:LGV-4000V 306005
(四吋4")
Gate Valve-014 GATE VALVE Model:SPGV6-MISO
6吋
Gate Valve-015 GATE VALVE Nor Cal 3"氣動閥
Model:GVP-2502-ISO-K91
Gate Valve-016 Slit DoorVALVE V-TEX TEL ETCH 1D80-002334-12
Gate Valve-017 GATE VALVE 6"氣動閥
GVP-6002-ISO-KR MS24
Gate Valve-018 GATE VALVE VAT?
4"氣動閥(496660/0011)
+4"蝶閥(95236-PAGC?AEJ2/0001)
P.13
?
Gate Valve-019 GATE VALVE VAT 14036-PE24-ARV1
Gate Valve-020 GATE VALVE VAT B90000220/4吋手動閥
ISO-F 100
Gate Valve-021 GATE VALVE VAT 10844-PE24-AHI1/0467氣
動閥
Gate Valve-022 GATE VALVE VAT B90000230/6吋手動閥
ISO-F 160
Gate Valve-023 GATE VALVE Model:SPGV4-MISO
4吋
Gate Valve-024 GATE VALVE PINNACLE 6吋手動閥
Gate Valve-025 GATE VALVE PINNACLE 4吋手動閥
Gate Valve-026 GATE VALVE VAT 14040-PE06-0007/0781(8
吋)
Gate Valve-027 GATE VALVE VAT 12140-PA24-0001
Gate Valve-028 GATE VALVE VAT 12048-PA44-0002
Gate Valve-
030 GATE VALVE MISO SPGV8-MISO
Gate Valve-
031 GATE VALVE VAT 12044-PA24-1002
P.14
?
Gauge-001
Bellow-001 AKT-5500 Cylinder-002
BOD-001 VAT Bond Slit Valve
WV-001
WV-002
WV-003
FAN-001
P.15
?
CTL-001 MKS Pressure Controller Novellus 651D-16202
CTL-002 SCR POWER CONTROLLER
AMAT P/N:0190-04619
CTL-003 Tylan General Controller
TYLAN GENERAL AC-2
THROTTLE VALVE
CONTROLLER PCV-
058LRC.796-006238-001
Model:AC-2
CTL-004
MKS 1651C-2S 28519
THROTTLE VALVE
CONTROLLER PCV-059
CTL-005
UDK5214NW
SN:XQ8AM52405
(5-PHASE DRIVER)
CTL-006 MKS 651CD2S2N
(653B-6-160-2)
CTL-007 VAT PM-5
CTL-008 651D-24942
CTL-009 MKS MKS 252E-1-VPO
CTL-010 PDR 2000 Dual
Capacitance Manometer MKS PDR2000
CTL-011 AP-420F
Pressure controller
MEGATORR
CORP AP-420
P.16
?
CTL-012 WATLOW 988A-22KA?NDRG 溫控器 WATLOW 988A-22KA-NDRG
CTL-013 高頻功率器 ENI OEM-28
CTL-014 低頻功率器-Low
Frequency Generator) ENI PL-2HF-11451-55
CTL-016 PM7-E VAT 650PM-26PM-AAK1
CTL-017 MKS Pressure Controller 651D-15413
P.17
?
CTL-018 PARAMOUNT
AE Generator 1513 3156310-038
CTL-019 NC APC Controller NC APC-800L-A-S01
CTL-020 AC Servo Driver VEXTA AID150A-C
CTL-021 800-Minarik VEXTA Novellus 524-20-516-0002
CTL-022 NC APC Controller NC APC-800-A
CTL-023 NC APC Controller NC 3870-044597
CTL-024 PM6 VAT 650PM-24BG-AEW1/0362
CTL-025 MKS Pressure Controller 651D-23564
CTL-026 MKS Pressure Controller 優貝克 PDR-C-1C-BCD
CTL-027 MKS Pressure Controller 651CD2S1N
CTL-028 MKS Pressure Controller 1651D2S2
P.18
?
POS-001 SWITCHING POWER
SUPPLY ELCO J30-5(5V6A)
J30-12(12V2.5A)
POS-002 壓力計電路板 TEL Trias TEL Trias TCV
BX80-070379-17
Moter-001 HP Motor AMAT
Endura 5500
Endura
Centura 5200
Centura RTP
Centura DXZ
Cendur
Centura HDP
HDP
?8"HP Motor
Centura HDP
HP Motor
HDP HP
Motor
HDP HP
MOTOR
Down HP
Motor
HP Motor
HDP HP
Motor(hp)
T/F
D/F
ETCH
P/N: UP: 0010-70317
P/N: 0010-75533
P/N: 0010-70317
P/N: 0010-13263
P/N: 0010-70264
P/N: 0010-76061
P/N: 0010-70265
P/N: U:0010-1323 D:0010-
1323
P/N: U:0010-70317 D:0010-
70317
P/N: U:0010-175533 D:
0010-75533
P/N:LO:0010-
70264;UP:0010-70317
P/N:LO:0010-
70264;UP:0010-70264
P/N:UP: 0010-13263 Down:
0010-13263
MOT-003 MKS MOTOR FOR 253B Throttle
Valve
MOT-004 VAT MOTOR VAT
65148-PACQ-AVV2/0011
MOTOR OVERHAUL
PUV-051一組
MOT-005 HDP MOTOR
0010-01389(12939900)燒
餅
PN:243A2A-SG36
MOT-006 VAT MOTOR VAT 65046-XHGH-BFU3/0480
?V-001 MKS THROTTLE
VALVE AMAT Producer SA-CVD
TEOS T/F 3870-03055
Model:253B-16083
PCV-006 MKS THROTTLE
VALVE PSC Producer
PSC Asher ET P/N:96045136L
PCV-011 MKS THROTTLE
VALVE AMAT Producer SA-CVD T/F SA Throttle Valve
PCV-022 MKS THROTTLE
VALVE AMAT Producer
Novellus 253B-15415
Throttle-007 SA Producer Throttle
valve AMAT Producer SA-CVD
BPSG T/F
0010-09857
0010-26231-001
0010-37140
Slit Valve-001 VAT Slit Valve AMAT Producer Chamber AMAT:3870-04338
0340X-CA24-BFP1
Slit Valve-005 VAT Slit Valve AMAT Producer Loadlock
AMAT:0520-00037
AMAT:0520-00068
0750X-UE24-AAL7/2862
0750X-UE24-AAL8/2710
?
Isolation-002
HDP/MKS Instruments
Round Body Right Amgle
Vacuum Valve( loadlock )
AMAT
LAM
Producer
or
process chamber
傳動用
or
Oxide
T/F
ETCH
AMAT:3870-02225
NW40
P/N:296-094383-001
LPV-40-AK-C0VS
796-801289-001
796-094363-002
796-094363-001
Isolation-005 Isolation Valve LAM
AMAT
LAM9600
AMAT Producer
SE
Metal ETCH P/N:0010-10778
P/N:0010-70271
Isolation-014 Isolation valve
SOFT，
PUMP，
LOADLOCThrottle-002 6" WCVD Throttle Valve AMAT P-5000 W-CVD T/F
ETCH
0010-10082
Throttle-003 Throttle vavle AMAT P-5000
0010-76174
0010-05496
0015-09077
Throttle-005 6" TEOS Throttle Valve AMAT P5000 TEOS T/F 0010-09301
Throttle-008 6" Nitride Throttle valve AMAT P-5000 Nitride T/F 0010-76175
Throttle-012 Throttle & ISO valve
Assembly AMAT P5000 0020-31281
Slit Valve VAT Slit Valve VAT P5000 0010-70321
Isolation-001
Nor-Cal Pneumatic Valve
NW40 Flange
FORELINE Isolation
Valve
AMAT Centura 5200 /
P5000
Oxide / HTF
/ TEOS T/F
NC NW40
P/N: 3870-01244
??
Isolation-006 Isolation Valve AMAT
Endura
HDP
P5000
STI
IMD
FSGV-002
HTF Process Chamber
PCV Valve
RTP Buffer Chamber
PCV Valve
AMAT Centura 5200 HTF T/F
253B-11203
253B-1-40-1
253B-13964
253B-26278
253B-15488
PCV-003
HTF Process Chamber
PCV Valve
RTP Chamber PCV Valve
AMAT Centura 5200 HTF T/F
253B-14570
253B-20-40-1
253B-16182
PCV-007 PCV Throttle Valve AMAT Centura 5200 IISG T/F
253B-14579
253B-12237
PCV-010 MSK Throttle vavle AMAT Centura 5200 CVD T/F 253B-24627
PCV-014 HDP Turbo Throttle
Valve 200mm Wafers AMAT Centura 5200 HDP T/F
AMAT：0010-08384
12939900-166
PCV-016 Throttle valve AMAT Centura 5200 HDP T/F P/N:253B-11102
PCV-017 Throttle valve AMAT Centura 5200 CVD T/F 253B Throttle valve
?
PCV-018 MKS THROTTLE
VALVE Novellus Centura 5200 CVD T/F 653B-1-40-1
653B-2-50-1
PCV-028 HDP Turbo Throttle
Valve 200mm Wafers AMAT Centura 5200 HDP T/F
Throttle-004
8" SA-CVD Throttle
Valve
8" TEOS / DxZ Throttle
Valve
AMAT Centura 5200 SA-CVD
TEOS T/F
P/N:0010-76174
P/N:0010-10778
P/N:0090-0034-001
Slit Door-001
Slit Valve door plate seal
Seal Slit Valve door
Slit Valve Door
AMAT Endura 5500
Centura 5200 CVD T/F
P/N: 485835-003
P/N: HC-W-001-S
P/N: WT04-001-R02-1
Slit Valve-001 8"Bellows assembly Slit
valve AMAT
Endura 5500
Centura 5200
Proudcer
Mainfram T/F
NCDQ2B80-UIA990
NCDQ2B80-G0656
NCDQ2B80-GO656-38
0020-35764 ,3020-01052
3020-00628 ,0010-76428
0010-20064 ,0010-20021
0030-70048 ,0020-22412
0020-22413
Isolation-001
Nor-Cal Pneumatic Valve
NW40 Flange
FORELINE Isolation
Valve
AMAT Centura 5200 /
P5000
Oxide / HTF
/ TEOS T/F
NC NW40 Weldod
bellow(180 度) /
P/N: 3870-01244
Isolation-009 Buffer Chamber Isolation
Valve AMAT Centura5200
WCVD
Mainfram
Buffer
T/F
3870-01422
P/N:162-0040K
NW40
P.3?
Isolation-010 Isolation Valve AMAT
Endura
Cendura
HDP
TxZ CVDThrottle-001 8" TxZ Throttle Valve AMAT Endura 5500 CVD-TiN
PVD T/F
PN:0010-09035
0010-37768
0010-09035
0010-38027
Throttle-001P Plug Bushing鐵氟龍 AMAT Endura 5500 CVD-TiN
PVD T/F
PN:0010-09035
0010-377680010-09035
0010-38027
Throttle-006 AMAT Applied Materials
?Non-Heated Throttle Valve AMAT Endura 5500 Copper Seed T/F 0240-28146
0010-09019
Gate Valve VAT GATE VALVE ASSY. AMAT Endura 5500 CVD T/F AMAT: 3870-02491
PN:10846-XE24-ADG1
Slit Door-001
Slit Valve door plate seal
Seal Slit Valve door
Slit Valve Door
AMAT Endura 5500
Centura 5200 CVD T/F
P/N: 485835-003
P/N: HC-W-001-S
P/N: WT04-001-R02-1
Slit Valve-001 8"Bellows assembly Slit
valve AMAT
Endura 5500
Centura 5200
Proudcer
Mainfram T/F
NCDQ2B80-UIA990
NCDQ2B80-G0656
NCDQ2B80-GO656-38
0020-35764 ,3020-01052
3020-00628 ,0010-76428
0010-20064 ,0010-20021
0030-70048 ,0020-22412
0020-22413
??
Slit Valve-002 AMAT Endura ENDURA
PRECLEAN P/N:0010-20753
Isolation-004 VALVE,ISO 11/2 MOD LAM
LAM9600
Endura 5500
SE
CFE
HDP ETCH NW25
839-013521-001
Isolation-006 Isolation Valve AMAT
Endura
HDP
P5000
STI
IMD
FSG
TxZ CVD
HDP
T/F
ETCH
NW40 NC 11/2"valve
bellow(90度)
3870-01256,
800-824-4166,
P/N:3870-01455
0190-00879,
3870-02890,0190-00879
Isolation-008 Isolation Valve AMAT DPS
Endura 300 mm Poly T/F
0190-70185 /0190-76185
NW40 MKS 11/2(180度)
93-6127 796-001289-001
L2-40-AK-225-UNUNH
L2-40-SP1/138-70-600
Isolation-010 Isolation Valve AMAT
Endura
Cendura
HDP
TxZ CVD
STI
IMD
T/F
NW40
AMAT：
3870-01334
3870-01256
050127-20
Isolation-012 Isolation Valve AMAT P5000
Endura HDP P5000
Asher
HDP T/F
P/N:3870-01213
NW25 NC 11/2"valveKS THROTTLE
VALVE
Novellus Novellus 153D-15972
153D-15973
MKS THROTTLE
VALVE
Novellus Novellus FOR
Loadlock 253B-15415
MKS Pressure Controller Novellus Novellus FOR
Loadlock 651D-16202
MKS THROTTLE
VALVE
Novellus Novellus FOR
Chamber 253B-15665(MKS)
253B-15416PCV-001 MKS THROTTLE
VALVE AMAT Producer SA-CVD
TEOS T/F 3870-03055
Model:253B-16083
PCV-006 MKS THROTTLE
VALVE PSC Producer
PSC Asher ET P/N:96045136L
PCV-011 MKS THROTTLE
VALVE AMAT Producer SA-CVD T/F SA Throttle Valve
PCV-022 MKS THROTTLE
VALVE AMAT Producer
Novellus 253B-15415
Throttle-007 SA Producer Throttle
valve AMAT Producer SA-CVD
BPSG T/F
0010-09857
0010-26231-001
0010-37140
Slit Valve-001 VAT Slit Valve AMAT Producer Chamber AMAT:3870-04338
0340X-CA24-BFP1
Slit Valve-005 VAT Slit Valve AMAT Producer Loadlock
AMAT:0520-00037
AMAT:0520-00068
0750X-UE24-AAL7/2862
0750X-UE24-AAL8/2710
?
Isolation-002
HDP/MKS Instruments
Round Body Right Amgle
Vacuum Valve( loadlock )
AMAT
LAM
Producer
or
process chamber
傳動用
or
Oxide
T/F
ETCH
AMAT:3870-02225
NW40
P/N:296-094383-001
LPV-40-AK-C0VS
796-801289-001
796-094363-002
796-094363-001
Isolation-005 Isolation Valve LAM
AMAT
LAM9600
AMAT Producer
SE
Metal ETCH P/N:0010-10778
P/N:0010-70271
Isolation-014 Isolation valve
SOFT，
PUMP，
LOADLOC
K
Producer Implant ET L2-40-AK-225-VNVNH
Isolation-008 Isolation Valve AMAT Producer Poly T/F
0190-70185 /0190-76185
NW40
93-6127 796-001289-001
L2-40-AK-225-UNUNH
L2-40-SP1/138-70-600
Isolation-031 Vacuum in
line type(L/L & Buffer) AMAT Producer ARC T/F LPV-40-IK-COVS
P/N:30076187
Filter Heater RF Fliter 200mm
Producer AMAT Producer T/F P/N:0090-02346
MKS Pressure Controller Novellus Novellus FOR
Chamber 651D-15413
Slit valve SMC Novellus
FOR
Chamber
&
Loadlock
XGT200-30-1A-X5S
XGT200-30-1A-X175
HVA Gate Valve Novellus Model：11210-0403QS
?
Isolation angle valve MDC Novellus Model：KAV-075-P
Isolation angle valve MDC Novellus Model：KIV-075-P
Isolation angle valve MDC Novellus Model：KAV-150-P
Isolation angle valve MKS Novellus PN：99D0362
bellow(180度)
Isolation-024 NW50 MKS Isolation valve AMAT Endura
Centura 5200 DSP T/F
ETCH
3870-02764
P/N:99121728
P/N:LPV-50-AK-COVS
Isolation-029 Chamber Roughing Valve AMAT Enndura II XP PVD Cobalt T/F
MKS, UHV-25-AKK?ENVN, NW25
MKS, UHV-25-AKC-ENVN
?
Isolation-030 VALVE PNEU-ACT
RTANG 1"OD 2.75CF AMAT Enndura T/F AMAT: 3870-01335
Isolation-031 MKS Isolation valve AMAT Enndura T/F AMAT: 0190-13041
PN:L2-40-SP1-316
STI
IMD
T/F
P/N: 3870-01256 / NW40
?050127-20
?3870-01334
Isolation-019 ISO Valve AMAT Endura
Cedura HDP T/F
P/N: LPV1-40-AK-CNVS
P/A: 10099R0421
Isolation-024 NW50 MKS Isolation valve AMAT Endura
Centura 5200 DSP ETCH
T/F
3870-02764
P/N:99121728
P/N:LPV-50-AK-COVS
Isolation-025 Isolation Valve AMAT Centura poly T/F P/N: 162-0050K
TxZ CVD
HDP
T/F ET
NW40 NC 11/2"valve
PN:800-824-4166
3870-01256
3870-01455
0190-00879
3870-02890
Isolation-012 Isolation Valve AMAT P5000
Endura HDP P5000
Asher
HDP T/F NC NW25 valve
P/N:3870-01213
K
Producer Implant ET L2-40-AK-225-VNVNH
Isolation-008 Isolation Valve AMAT Producer Poly T/F
0190-70185 /0190-76185
NW40
93-6127 796-001289-001
L2-40-AK-225-UNUNH
L2-40-SP1/138-70-600
Isolation-031 Vacuum in
line type(L/L & Buffer) AMAT Producer ARC T/F LPV-40-IK-COVS
P/N:30076187
Filter Heater RF Fliter 200mm
Producer AMAT Producer T/F P/N:0090-02346
MOT-007 MKS MOTOR MKS FOR 253B Throttle
Valve
MOT-008 VAT MOTOR VAT Pendulum
VAT 65048-JHHS
MOT-009 Stepper Indexer Z Moto Minarik Novaellus 02-034908-00
MOT-010 Harmonic DC Servo Motor Minarik Novaellus RH-8-6006-E100AL